Definition of Thin-film bulk acoustic resonator
A thin-film bulk acoustic resonator (FBAR or TFBAR) is a device consisting of a piezoelectric material manufactured by thin film methods between two conductive – typically metallic – electrodes and acoustically isolated from the surrounding medium. The operation is based on the piezoelectricity of the piezolayer between the electrodes.
FBAR devices using piezoelectric films with thicknesses typically ranging from several micrometres down to tenths of micrometres resonate in the frequency range of 100 MHz to 20 GHz. FBAR or TFBAR resonators fall in the category of bulk acoustic resonators (BAW) and piezoelectric resonators and they are used in applications where high frequency, small size like thickness and/or weight is needed.
Industrial application areas of thin film bulk acoustic resonators include high-frequency signal filtering (e.g. for mobile telecommunication devices), crystal replacements, energy harvesting, sensing, sound emission (e.g. in hearing aids) and as part of mechanical qubits.
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Frequently asked questions
What is Thin-film bulk acoustic resonator?
A thin-film bulk acoustic resonator (FBAR or TFBAR) is a device consisting of a piezoelectric material manufactured by thin film methods between two conductive – typically metallic – electrodes and acoustically isolated from the surrounding medium.